Structural characterization of nanostructures grown by Ni metal induced lateral crystallization of amorphous-Si
نویسندگان
چکیده
منابع مشابه
The Effects of Extended Heat Treatment on Ni Induced Lateral Crystallization of Amorphous Silicon Thin Films
The effects of extended heat treatment on the rate of metal induced lateral crystallization (MILC) of amorphous silicon (a-Si) were investigated. Orientation image microscopy and transmission electron microscopy were employed to reveal the crystallinity of the thin film and to measure the MILC length. It was found that for circular Ni disc patterns, the radial dimensions of the resulting MILC r...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2016
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.4941349